Crystal Material
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Single Crystal Gallium Arsenide, VGF / LECgrown, 高純單晶
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Crystal Orientation
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(1 0 0) / (1 1 1)
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Doping
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Undoped
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Zn
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Si / Te
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Diameter
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50~150mm ± 0.25mm(2"、 3"、 4"、6")
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Thickness
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350 ± 25um / 550 ± 25um / 625 ± 25um
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Crystal Orientation Angle
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( 100 )or(111) α 0 ±β 0, off angle α and accuracy β upon request
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Resistivity
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(1-30)x10 7 Ω.cm
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(1-10)x10 -3 Ω.cm
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Mobility Ratio
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1500~3000 3000~5000 cm2 / V·sec
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N / A
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doping content
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N / A
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(0.1-3.0)×10 18 /cm3
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Etch Pit Density
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≤ 5·103 cm-2
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≤ 7·10 4cm-2
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≤ 5·102 cm-2
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Primary flat length
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(0-1-1)±0.5deg, 16 ±1.0mm /22±1.0mm/32.5±1.0mm
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Second flat length
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(0-1 1) )±5.0 deg, 8 ±1.0mm / 11±1.0mm/ 18±1.0mm
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Front surface
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Polished in Epi-ready Prime grade, 外延生長級拋光
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Back Surface
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Polished / Lapping or Etched, 拋光 / 研磨或腐蝕
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Epi-ready
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Yes
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