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           Product Specification

Crystal Materials	99,996% of Al2O3,High Purity, Monocrystalline, Al2O3
Crystal quality	Inclusions, block marks, twins, Color, micro-bubbles and dispersal centers are non-existent
Diameter	2inch	3inch	4inch	5inch ～ 7inch
	50.8± 0.1mm	76.2±0.2mm	100±0.3mm	In accordance with the provisions of standard production
Thickness	430±15μm	550±15μm	650±20μm	In accordance with the provisions of standard production
	330±15μm	500±15μm	550±20μm
	250±15μm	430±15μm	500±20μm
Orientation	C- plane (0001) to M-plane (1-100) or A-plane(1 1-2 0) 0.2±0.1° /0.3±0.1°, R-plane (1-1 0 2), A-plane (1 1-2 0 ), M-plane(1-1 0 0), Any Orientation , Any angle
Primary flat length	16.0±0.8mm	22.0±1.0 mm	32.5±1.5 mm	In accordance with the provisions of standard production
Primary flat Orientation	A-plane (1 1-2 0 ) ± 0.2°
TTV	≤10μm	≤15μm	≤20μm	≤30μm
LTV	≤10μm	≤15μm	≤20μm	≤30μm
TIR	≤10μm	≤15μm	≤20μm	≤30μm
BOW	≤10μm	≤15μm	≤20μm	≤30μm
Warp	≤10μm	≤15μm	≤20μm	≤30μm
Front Surface	Epi-Polished (Ra< 0.2nm)
Back Surface	Fine ground (Ra=0.5 to 1.2 μm), Epi-Polished (Ra< 0.2nm)
Note	Can provide high-quality sapphire substrate wafer according to customers' specific requirement