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Diameter           

2 inch,

3 inch

4 inch

5 inch - 7 inch

Thickness       

500±15 μm, 660±15 μm, 710±15 μm, 790±15 μm, 1000±20 μm

Orientation   

X-Axis   Y-Axis   Z-Axis ±0.1° Y-axis 128° Rotated, Y-axis 64° Rotated,               Y-axis 41° Rotated

The first reference to the Orientation

 ± 0.2°

The first reference to the length

16.0±0.8 mm

22.0 ±1.0 mm

32.5±1.5 mm

comply with the the provisions of standard production

TTV 

≤10 μm

≤15 μm

≤20 μm

≤30 μm

BOW

≤10 μm

≤15 μm

≤20 μm

≤30 μm

Front polishing

10/5

Back Surface

Fine ground, (#240/#180)  /  Polished, 10/5

Chamfer

< 0.3 mm, 45°±5°